Scholar's Cultivation System Panel

Time soon entered June, and all members of the extreme ultraviolet lithography machine project were shocked by Xu Yun again. Even though they were prepared in their hearts, they were still speechless.

If the first two meetings were simply surprising and unbelievable, then this time it was beyond my understanding.

After Xu Yun planned the next direction of the project, they started to study the light source.

Although everyone knows that it is very difficult, it may be because Xu Yun's joining is full of fighting spirit and passion, and they want to use their own abilities to contribute to the progress of the project.

Unexpectedly, the development of things exceeded everyone's expectations.

Just over ten days later, Xu Yun held another project meeting.

At first they thought it was a further discussion on the research of the light source, but Xu Yun actually came up with a specific plan at the meeting.

And it has been confirmed by research that the feasibility is very high.

"I designed this production plan for the light source. I think its power is sufficient to meet the needs of high-end lithography machines. Next, we should manufacture this light source for testing as soon as possible."

In the conference room, Xu Yun looked at the people who were looking at the documents in their hands, and said these words calmly.

That day, he overclocked his brain to solve the light source problem, and immediately wrote down the plan in his mind.

And hold a project meeting to announce the matter as soon as it is completed.

In the past, if he suddenly got this light source design plan, it would definitely cause a great sensation in the outside world, and he really wondered if he had accidentally obtained the technology possessed by an alien civilization.

It is possible to be investigated and monitored.

But now he has already shown his strength to the outside world, and he is capable of solving the problem of lithography machines.

So there is no need to deliberately delay more time.

At this moment, everyone in the conference room was focused on the documents, and they didn't even know whether they had heard Xu Yun's words. In short, they did not hide the surprise and shock on their faces.

Including Luo Changhui, who is an academician.

Seeing everyone's reactions in his eyes, Xu Yun knew that if they didn't get out of the current state, he probably wouldn't listen to anything he said.

In this case, even though he was a bit dumbfounded, he had no choice but to keep silent.

Stay silent for now.

In this way, I don't know how much time passed before I saw Luo Changhui first stop his movements and raise his eyes.

"Are you going to adopt the xenon fluoride light source solution?"

"That's right." Xu Yun nodded.

The light source manufacturing direction he obtained by consuming points is exactly the xenon fluoride light source.

Compared with other common light sources on the market, xenon fluoride light source has better performance and is suitable for photolithography.

However, it is more difficult to make.

The problems faced by this light source have not been solved in China.

Luo Changhui obviously knows the situation of various light sources very well, so after seeing the content in the file, he is basically sure that there is a high probability that it is feasible.

In other words, as long as they manufacture the xenon fluoride light source according to the design plan in this document, they may succeed. This is equivalent to completely solving the problem of the light source of high-end lithography machines and greatly shortening the cost of domestic high-end lithography machines. R \u0026 D progress.

But what shocked him the most was that the design came from the hands of Xu Yun.

He can be sure that Xu Yun should not have systematically studied lithography machines before joining the project and becoming the person in charge.

In other words, Xu Yun not only determined the research direction but also completed the plan in just ten days.

It's simply a monster.

Although it has long been heard that Xu Yun's talent is very powerful, and he has continuously created many miracles in different fields.

However, this is not a clear concept.

And now he sees it.

Forcibly suppressing the incomparable excitement in his heart, he confirmed again: "You wrote this plan?"

"While it hasn't been tested in practice, I think the theory is plausible."

Xu Yun replied calmly, and then asked back: "Does Academician Luo think this theory will work?"

"You can try it." Luo Changhui replied in a deep voice.

For now, they do not have other mature light source solutions, and Xu Yun's xenon fluoride light source is indeed the best choice.

In addition, the theory in the document is very detailed, and it won’t take long to get a stable xenon fluoride light source if we actually start to manufacture it. Whether it can meet the requirements of the lithography machine at that time, we only need to test the power that the light source can emit stably.

If you really want to succeed, the domestic extreme ultraviolet lithography machine is equivalent to overcoming a major problem.

It is a breakthrough progress.

The key is not long since the establishment of the new extreme ultraviolet lithography machine project.

Of course it doesn't matter if you fail.

The right to accumulate experience.

At this point in the conversation between the two of them, Professor Yang Jing, the researcher next to him, finally came back to his senses, with a smile beyond words.

"This plan is great. I'm sure that as long as the above is followed, a powerful and stable xenon fluoride light source can be produced."

As his words fell, several other researchers also expressed their opinions as if they had been opened up.

"I haven't found any loopholes yet."

"The solution is theoretically possible, and we should try it experimentally right now."

"It is a very correct decision to invite Professor Xu to be the project leader. It has only been a long time since you have a solution for the light source of the extreme ultraviolet lithography machine."

After listening to the words of several researchers, Xu Yun had a slight smile on his face and said a little modestly.

"I have done related research on light sources before, and I am not 100% sure about this plan."

"Not to mention 100% certainty, even a little bit of certainty is worth trying." Luo Changhui also calmed down at this time, and added a sentence after taking over the conversation.

The Institute of Optoelectronics Technology began to develop lithography machines very early, but it has always lagged behind overseas.

It simply does not have the ability to manufacture high-end chips.

Among them, the research on the light source is even more limited, and it is difficult to increase the power of the light source and ensure a stable output.

It is no exaggeration to say that if Xu Yun did not join the project team, they would have to study for a long time with the xenon fluoride light source.

After all, it is not so great to be able to produce a xenon fluoride light source. The key is to ensure power and continuous stable output.

If the light source cannot be guaranteed to be stable, no matter how high the maximum power is, it cannot be used for extreme ultraviolet lithography machines.

This alone is enough to prove Xu Yun's strength.

But if you want to say who has the most emotional fluctuations in the conference room at the moment, it must be Liu Xing and several other postdoctoral research assistants.

I almost wrote my thoughts on my face.

Because Xu Yun didn't copy too many copies of the plan, only Luo Changhui and a few researchers saw it just now.

Suddenly seeing the reactions of researchers including Luo Changhui after reading the document, they will inevitably feel very curious, especially when they hear about the light source later, their mood swings become more intense and they know that this is definitely big news.

In the end, Liu Xing was the first to be unable to hold back, and cast his gaze to ask Xu Yun.

"Professor Xu, can we have a look at this proposal?"

Naturally, Xu Yun didn't forget that they were research assistants. Since they were all members of the project team, they must have the right to know.

Besides, everyone can work together to speed up the progress.

Originally, he planned to let the researchers talk about it after the meeting. Since everyone is looking forward to it so much, it doesn't matter if it is in advance.

The thought stayed here and Xu Yun didn't hesitate, and immediately picked up the plan in front of him and handed it over: "If you want to see it now, then watch it."

"Thank you Professor Xu."

Liu Xing did not choose to refuse at this time, and hurriedly stepped forward to take the document and share it with the people around him.

Being able to enter the postdoctoral mobile station of the Institute of Optical Technology, Liu Xing and others may not be so bad. Compared with Yang Jing and other researchers, it is nothing more than the gap in experience and qualifications.

You will naturally have your own judgment on the contents of the file, and know whether it has experimental value.

Probably because they were more happy to find the research direction of light source, Luo Changhui, Yang Jing and other researchers did not show any impatience, but waited patiently for Liu Xing and other postdoctoral fellows to roughly read the document.

After some time passed, Liu Xing came to his senses first, and immediately looked at Xu Yun after handing the document to the person beside him.

His eyes were full of admiration and excitement.

"Professor Xu, you are so powerful. I didn't expect to have a method of making xenon fluoride light source so soon."

As soon as the words fell, the rest of the people spoke one after another, not to be outdone.

"I didn't expect to use this method to solve the difficulty of manufacturing xenon fluoride light sources. I didn't even have any ideas in this regard before."

"With this plan, will we soon be able to create a stable light source?"

"I can't wait to be part of the experiment."

At this time, before Xu Yun could answer, Luo Changhui, who was sitting next to him, took the initiative to say: "Now is not the time for us to celebrate, at least we need to get detailed xenon fluoride test results. Stop what you're doing and focus on making xenon fluoride light source devices." It can be seen that his whole body's passion has been mobilized.

What Luo Changhui said was exactly Xu Yun's next arrangement, so he added a sentence along the way.

"Then today's meeting ends here, and I think everyone should be busy in the next time."

After speaking, the meeting officially ended.

Today, all the project members were called to attend the meeting, mainly to discuss the manufacturing plan of the xenon fluoride light source. Now that the plan has been collectively approved, there is no need to waste time.

What's more, I believe that after what happened just now, everyone can't wait to do it.

After all, it is a glorious thing to be able to participate in the birth of the first domestic extreme ultraviolet lithography machine.

Of course, the actual situation is exactly the same.

After the meeting, under the leadership of Xu Yun, everyone was assigned tasks.

Immediately started manufacturing xenon fluoride light source.

——

Unlike making xenon fluoride from scratch, the former requires constant trial and error to bear the result of low power or unable to maintain a stable output for a long time. In addition to requiring a lot of investment, this process is also very time-consuming and eventually no results are normal. .

But Xu Yun and the others are completely different.

With that design plan as a basis, this is equivalent to an open-book exam.

The process they carry out is to copy the answers on the test paper, which basically does not require much effort.

In addition to Xu Yun's personal participation, the institute successfully manufactured a xenon fluoride light source device almost at the end of June.

And in order to determine whether it can be used in high-end lithography machines, the wavelength power stability of the light source was tested on the same day.

"Although I think we can definitely succeed this time, I still feel a little nervous for some reason."

On June 22, 2020, Jincheng, the extreme ultraviolet lithography machine project of the Institute of Optoelectronics Technology.

Outside the light source testing laboratory, Yang Jing, who was wearing a white research uniform, seemed a little uneasy as he walked back and forth. Although he pretended to be calm on the surface, the small expression on his face still revealed his true feelings.

After participating in the manufacture of the light source during this period, he became more convinced of the feasibility of Xu Yun's plan.

It is considered that the problem of the light source of the extreme ultraviolet lithography machine has been solved.

But seeing the final light source test results coming out, I was still somewhat uneasy.

Compared with Yang Jing, who couldn't sit still, Luo Changhui was obviously much calmer, and he didn't forget to open the cup to drink tea while sitting on the chair next to him.

"Put your mind at ease. Since you have chosen to trust Professor Xu, wait patiently for the result."

"I'm afraid." Yang Jing was a little embarrassed to hear Luo Changhui's words.

Anyway, he is also a researcher professor half buried in the ground, and he is not as good as those postdoctoral fellows when encountering things, which is indeed somewhat inappropriate.

But that being said, let me ask how many people can really be calm.

As the saying goes, it is difficult to accept darkness after seeing the light. Xu Yun's light source solution gave them hope, which belongs to the hope that the domestic extreme ultraviolet lithography machine can finally be delivered.

If the final test results cannot meet the requirements, then these days of hard work will be in vain.

Although scientific research should not be afraid of failure, it must be a big blow to the project members.

Yang Jing didn't respond to Luo Changhui's words, but turned his gaze to Xu Yun who was also calm, and asked with his lips lightly parted after a little hesitation.

"Professor Xu."

"Do you think we can succeed this time?"

"Of course it will succeed." Xu Yun met the other party's eyes very firmly when he heard the answer.

Anyway, this is the plan he deduced by spending 150 points, so he is 100% sure.

It can be said that the probability of special situations basically does not exist.

Because of this, he remained calm the whole time, without worrying at all.

Even if Yang Jing hadn't taken the initiative to ask, he didn't even intend to say a word.

But whether it should be said or not, Yang Jing calmed down a lot when he heard Xu Yun's words, obviously out of trust in Xu Yun, he chose to believe in the test results of the light source.

In this way, more than ten minutes passed, and Liu Xing, who was wearing a research uniform, finally came out from the inside, holding a test data report of the xenon fluoride light source in his hand.

Almost instantly everyone's attention was focused on Liu Xing, and even Luo Changhui stood up abruptly.

But Liu Xing didn't seem to notice the other people, he went straight to Xu Yun and handed over the report while opening his mouth to report.

"Professor Xu."

"Our xenon fluoride light source test was successful."

"This is detailed data."

Although Xu Yun had known for a long time that this would be the result, when he heard this sentence, he suddenly quickened his hand movements and quickly checked the detailed data above.

First, the wavelength of the xenon fluoride light source is 13.5 nanometers, which meets the requirements of the extreme ultraviolet lithography machine.

The working power of the light source has successfully reached 250 watts, and it is very stable.

In other words, the xenon fluoride light source they manufactured can be used in extreme ultraviolet lithography machines, which is a big step forward from the official delivery of the first domestic high-end lithography machine.

"Look at it too."

Xu Yun confirmed the result, and handed over the reports in his hand to Yang Jing, Luo Changhui and others.

Excitement appeared on the faces of the latter few people.

"We really hit it off, and it's a real EUV light source."

"The hard work of working overtime and staying up late these days is worth it. Those arrogant guys overseas certainly would not have thought that our research and development would go so smoothly."

"It's all thanks to Professor Xu that we can do what we are doing today."

When everyone was immersed in this joy, Liu Xing, who did not hide the excitement on his face, suddenly put forward a suggestion of his own in front of everyone.

"Professor Xu."

"Should we announce the good news immediately, and let those overseas see whether we can manufacture extreme ultraviolet high-end lithography machines."

This sentence was also agreed by Yang Jing, who also echoed: "Let everyone know about our major breakthrough in the light source, and I will definitely be very happy to mobilize the public's trust in the semiconductor field."

But Xu Yun chose to refuse.

"There is no rush for this matter."

After shaking his head to express his attitude, he then opened his mouth to explain.

"Compared to a breakthrough in a light source, it is better to wait for the first domestic high-end lithography machine to be delivered and then announce the news to the outside world. The sensation will definitely be greater by then."

"It is best to have a huge impact on the overseas high-end chip manufacturing industry chain."

"Besides, I think this day will come soon." Shen Sheng said, here Xu Yun added another sentence.

Both Liu Xing and Yang Jing have been convinced by Xu Yun, so naturally they will not object to his decision.

Thinking about it carefully, it is really better to hide the breakthrough in the light source first, and then directly give the outside world a big surprise.

However, Luo Changhui heard other information from Xu Yun's words, temporarily resisting the inexplicable excitement in his heart, and hurriedly asked.

"Professor Xu."

"What did you mean when you said that day would come soon?"

As soon as this remark came out, it immediately aroused the curiosity of other people, and they all focused on waiting for Xu Yun's next words.

Xu Yun didn't mean to hide it, but a meaningful smile appeared on the corner of his mouth first, and he blinked and replied: "It's literally, I'm working on the design of the projection system and mask, and it probably won't take long. There will be results."

Now that the light source problem has been completely solved, it is natural to deal with the other two problems.

After all, he still has a lot of points left.

I have to say that his words undoubtedly stirred up a thousand waves with one stone, and once again deeply shocked everyone present.

Based on the meaning of Xu Yun's words, it seems that progress has been made in the projection system and masks.

They might not have thought about it before, but now...

Even if Xu Yun said that the extreme ultraviolet lithography machine can be manufactured in two months, he would not be too surprised.

After the shock, there is ecstasy. Thinking that the emergence of domestic high-end extreme ultraviolet lithography machines is getting closer and closer, how can we not make people feel excited.